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h-diffusion mech in PECVE nitride

2011-01-30 22:117270下载
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H-Diffusion Mechanism(s) in
PECVD Nitride Passivation of
Si Solar Cells
Preprint
October 2001 • NREL/CP-520-31002
B. Sopori and Y. Zhang
To be presented at the NCPV Program Review Meeting
Lakewood, Colorado


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